技術支援

Supported systems :

Our service offerings include installation, turnkey, refurbishment, troubleshooting and parts test.

 Surface Scan particle measurement equipment

o   6200, 6220, 6400, 6420,

o   SP1-Classic, SP1-TBI, SP1-DLS,

o   SP2, SP3.

Overlay metrology equipment

o   5100, 5200XP, 5300,

o   Archer10, Archer10XT, Archer AIM.

Defect inspection equipment bright field

o   2132, 2135, 2138, 2139.

o   23XX Series

Defect inspection equipment dark field

o   SFS7600,SFS7700

o   Viper 2401,2430,2435

o   AIT1, AIT2, AIT3, AIT XP, AIT XP+, AIT XUV

o   Puma9000,9100,9130,9150,9550,9850,9980

Thickness measurement equipment

o   FT600, FT750

o   UV 1050, UV 1250, UV 1080, UV 1280, F5X, FX100, FX200.

o   OP2600, OP3260, OP3290, OP5205, OP5230, OP5240, OP5340.

o   Nanomatric 8000X, 8000XSE, 8300X, 9000, 9100, 9300

Dose monitoring system

o   TP420,TP500,TP500XP,TP630XP

Resistivity measuring systems

o   RS35, RS55, RS75, RS100, RS200.

High resolution & standard surface profiler

o   P11, P15, P22, P30, HRP220, HRP240.

Stress meter

o   FLX2320, FLX2908, FLX5400, FLX5500.

Quantox

o   Quantox 64000, Quantox 64100, Quantox XP.