技術支援
Supported systems :
Our service offerings include installation, turnkey, refurbishment, troubleshooting and parts test.
▼Surface Scan particle measurement equipment
o 6200, 6220, 6400, 6420,
o SP1-Classic, SP1-TBI, SP1-DLS,
o SP2, SP3.
▼Overlay metrology equipment
o 5100, 5200XP, 5300,
o Archer10, Archer10XT, Archer AIM.
▼Defect inspection equipment bright field
o 2132, 2135, 2138, 2139.
o 23XX Series
▼Defect inspection equipment dark field
o SFS7600,SFS7700
o Viper 2401,2430,2435
o AIT1, AIT2, AIT3, AIT XP, AIT XP+, AIT XUV
o Puma9000,9100,9130,9150,9550,9850,9980
▼Thickness measurement equipment
o FT600, FT750
o UV 1050, UV 1250, UV 1080, UV 1280, F5X, FX100, FX200.
o OP2600, OP3260, OP3290, OP5205, OP5230, OP5240, OP5340.
o Nanomatric 8000X, 8000XSE, 8300X, 9000, 9100, 9300
▼Dose monitoring system
o TP420,TP500,TP500XP,TP630XP
▼Resistivity measuring systems
o RS35, RS55, RS75, RS100, RS200.
▼High resolution & standard surface profiler
o P11, P15, P22, P30, HRP220, HRP240.
▼Stress meter
o FLX2320, FLX2908, FLX5400, FLX5500.
▼Quantox
o Quantox 64000, Quantox 64100, Quantox XP.
