量測設備銷售 / Thermawave

Opti-Probe 5230I

產品介紹：

Film Thickness Measurement Tool　

SN:8142

 

  • Currently Configured for 200mm Wafer Sizes
  • MFG Date： Aug. 2000
  • Process Type: Single Wafer
  • Cassette Interface：
    • SMIF
    • 25-slot per/Cass (Notch)
  • Wafer Handler Type： Puck
  • Controller Type： Equipe ESC-212
  • Spectrometer Type： Array
  • Vision Processor： COGNEX
  • SECS II Interface

相關資訊：

N/A