量測設備銷售 / KLA
KLA-Tencor Surfscan 6420
產品介紹：
Equipment description:
‧Purpose: Unpatterned Surface Inspection System, to monitor:
Bare silicon wafers and bare silicon wafers with films surface particles and defects.
‧Model: KLA-Tencor Surfscan 6420
‧SN: 0900-653
System configuration:
2.1 Currently Configured for 150/200 Wafer Size
2.2 Handler: 150/200mm
2.3 Laser: 30mW Argon Laser, 488nm wavelength, blue laser
2.4 Operator Interface: Trackball and keyboard standard
2.5 PC configurations:
2.6 OS: Windows 98
2.7 SFS6XX0 software version: 4.2
相關資訊：
N/A
