Equipment description:

   1.1 Purpose: Overlay measurement

   1.2 Model: KLA-Tencor Archer 10XT

  1.3 Original Manufacture Date: 2004

  1.4 SN: 3402

  1.5 Location: Currently in Omni-Semitech Inc. warehouse

System configuration:

  2.1 Currently Configured for 300mm Wafer Size

  can be config for 200mm SMIF x 2 as option

  2.2 Handler: 300mm Dual FOUP

  2.3 Robot: Brooks PRI ATM407

  2.4 Chuck Type: 300mm Vacuum

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