Equipment description:

●   Currently Configured for 200mm Wafer Size

●  Model: KLA-Tencor AITXP+ ( AIT3 Upgraded )

●  Original Manufacture Date: Oct.2000

●   SN: 9223

System configuration:

●   Handler Configured for 200mm Wafer Size

●  Laser: 75mW Argon Laser

●   Operator Interface: Trackball and keyboard standard

●  PC configurations:

1.  CPU: Pentium 850MHz

2.   Memory: 512M

3.  OS: Windows NT 4.0 SP6

●  Application software: Version 5.3.20.5

●  Wafer Transport Type: can configure to SMIF Indexer, Versa Ports/Open Cassettes

●  Equipe PRI Aligner/Robot/Track

●  GEM/SESC (RS232,25pin)

●   Facilities:

1.   Vacuum: 20 in.-Hg @ 0.5 SCFM (508 mm-Hg @ 14 L/min)

2.   Nitrogen or CDA: 90 psi @ 4 SCFM ( 6.32 kg/cm^2 @ 280 L/min)

3.   Power: 208/220/240VAC, 34A, 3W+Gnd, Freq. 60Hz

N/A