Equipment description:

● Currently Configured for 200mm Wafer Size

● Model: KLA-Tencor AITXP ( AIT2 Upgraded )

● Original Manufacture Date: Sept.1999

● SN: 9060

System configuration:

● Currently Handler Configured for 200mm Wafer Size, Dual Open cassettes & Dual Fork End-Effector

● Laser: 75mW Argon Laser

●  Operator Interface: Trackball and keyboard standard

●  PC configurations:

1.  CPU: Pentium 850MHz

2.  Memory: 512M

3.  OS: Windows NT 4.0 SP6

● Application software: Version 5.3.20.5

● Wafer Transport Type: can configure to SMIF/Open Cassettes

● ASYST SMIF Indexer/Versa Port

● GEM/SESC (RS232,25pin)

● Inspection Module Dimensions:

1.   Height: 194.31 cm (76.5")

2.   Width: 126.8 cm (49.92")

3.  Depth: 115.1 cm (45.3")

4.  Service clearance on all sides: (36")

Facilities:

1.  Vacuum: 20 in.-Hg @ 0.5 SCFM (508 mm-Hg @ 14 L/min)

2.   Nitrogen or CDA: 90 psi @ 4 SCFM ( 6.32 kg/cm^2 @ 280 L/min)

3.   Power: 208/220/240VAC, 34A, 3W+Gnd, Freq. 60Hz

N/A