Equipment description:

● Model: KLA-Tencor AIT2

● Original Manufacture Date: April.2000

● SN: 9144

● Chuck Type: 200mm Vacuum

System configuration:

● Laser: 75mW Argon Laser

● Operator Interface: Trackball and keyboard standard

● PC configurations:

1.  CPU: Pentium 200MHz

2.  Memory: 256M

3.  OS: Windows NT 4.0 SP6

● Application software: Version 5.3.20.5

● Wafer Transport Type: can configure to SMIF/Open Cassettes

● Equipe PRI Aligner/Robot/Track

● ASYST SMIF Indexer/Versa Port

● GEM/SESC (RS232,25pin)

● Facilities:

1.  Vacuum: 20 in.-Hg @ 0.5 SCFM (508 mm-Hg @ 14 L/min)

2.   Nitrogen or CDA: 90 psi @ 4 SCFM ( 6.32 kg/cm^2 @ 280 L/min)

3.  Power: 208/220/240VAC, 34A, 3W+Gnd, Freq. 60Hz

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