量測設備銷售 / Thermawave

Opti-Probe 3260DUVI

產品介紹：

Film Thickness Measurement Tool　

SN:6601

  • Currently Configured for 200mm Wafer Sizes
  • MFG Date： DEC. 1997
  • Process Type： Single Wafer
  • Cassette Interface：
    • Open Cassette x2
    • 25-slot per/Cass (Notch)
  • Wafer Handler Type： Puck
  • Controller Type： Equipe ESC-200
  • Spectrometer Type： Array
  • Vision Processor：
    • COGNEX
    • SECS II Interface
  • OS Software： DOS

相關資訊：

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