Equipment description:

‧Purpose: Sheet Resistance mapping System

‧Model: RS75TCA

‧Original Manufacture Date: 1998

‧SN: 990210RS75TCA

System configuration:

‧Currently Configured for 200mm Wafer Size

‧Robot: H2 Wafer handler, Single End-Effector

‧Chuck Type: 200mm

‧Operator Interface: Trackball and keyboard standard

‧Application software: StatTrax ST-6.71

‧Option: GEM/SECS

N/A