量測設備銷售 / KLA

KLA-Tencor Viper 2401

產品介紹：

Equipment description:

  • Purpose: Automated macro-defect inspection system Brightfield and darkfield inspection
  • Model: KLA-Tencor Viper 2401
  • Original Manufacture Date: Aug 2000
  • SN: V24010752

 

System configuration:

  • Currently Configured for 200mm Wafer Size
  • Handler: 200mm Dual Open Cassette
  • Cassette Handling: Vacuum Handling Open Handler
  • Robot: Brooks-PRI
  • OS: Windows NT 4.0

相關資訊：

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