量測設備銷售 / KLA

KLA-Tencor 5300

產品介紹:

Equipment description:

  • Purpose: Overlay measurement
  • Model: KLA-Tencor 5300
  • Original Manufacture Date: Jan, 2001
  • SN: 3127

 

System configuration:

  • Currently Configured for 200mm Wafer Size
  • Handler: 200 mm open cassette 
  • Robot: Brooks-PRI, Single End-Effector
  • Chuck Type: 200mm Vacuum
  • Operator Interface: Trackball and keyboard standard
  • PC configurations:
    • CPU: PII 400MHz
    • Memory: 128M
    • 3.5”(1.44MB) Floppy Drive
    • (2) 9GB SCSI HD
    • CD-ROM Drive
    • 2GB Tape Drive
    • Video Printer: Sony UP-895CE
  • Software: Version :
    • OS: Windows NT 4.0
    • Main SW version: 15.20.09
    • Analysis: 7.01.14

相關資訊:

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