Equipment description:

• Purpose: Overlay measurement
• Model: KLA-Tencor 5300
• Original Manufacture Date: Jan, 2001
• SN: 3127

System configuration:

• Currently Configured for 200mm Wafer Size
• Handler: 200 mm open cassette 
• Robot: Brooks-PRI, Single End-Effector
• Chuck Type: 200mm Vacuum
• Operator Interface: Trackball and keyboard standard
• PC configurations:
  • CPU: PII 400MHz
  • Memory: 128M
  • 3.5”(1.44MB) Floppy Drive
  • (2) 9GB SCSI HD
  • CD-ROM Drive
  • 2GB Tape Drive
  • Video Printer: Sony UP-895CE
• Software: Version :
  • OS: Windows NT 4.0
  • Main SW version: 15.20.09
  • Analysis: 7.01.14

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