量測設備銷售 / KLA

KLA-Tencor UV1250SE

產品介紹:

Equipment description:

‧Purpose: Thin Film Measurement Systems

‧Model: UV1250SE

‧Original Manufacture Date: 1996

‧SN: 961290UV1250SE

System configuration:

‧Currently Configured for 200mm Wafer Size

‧Cassette Handling: Open cassette x 2

‧Robot: H2 handler

‧Chuck Type: 200mm

‧Operator Interface: Trackball and keyboard standard

‧PC configurations:

  1. CPU: PIII 450MHz
  2. Memory: 128M
  3. OS: Windows NT4.0 environment

‧Application software: SUMMIT V3.34.07

‧GEM/SECS

 

‧Facilities:

  1. Vacuum: 20” (510 mm) Hg @ 1 SCFM
  2. Air: Minimum 80-100 psi
  3. Exhaust Vent and Fittings: 6” (150 mm) diameter, flexible hose,

pulling 260 cubic feet per minute.

  1. Power: 1 Phase 220V VAC,50/60 Hz

相關資訊:

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