量測設備銷售 / KLA
KLA-Tencor UV1250SE
產品介紹:
Equipment description:
‧Purpose: Thin Film Measurement Systems
‧Model: UV1250SE
‧Original Manufacture Date: 1996
‧SN: 961290UV1250SE
System configuration:
‧Currently Configured for 200mm Wafer Size
‧Cassette Handling: Open cassette x 2
‧Robot: H2 handler
‧Chuck Type: 200mm
‧Operator Interface: Trackball and keyboard standard
‧PC configurations:
- CPU: PIII 450MHz
- Memory: 128M
- OS: Windows NT4.0 environment
‧Application software: SUMMIT V3.34.07
‧GEM/SECS
‧Facilities:
- Vacuum: 20” (510 mm) Hg @ 1 SCFM
- Air: Minimum 80-100 psi
- Exhaust Vent and Fittings: 6” (150 mm) diameter, flexible hose,
pulling 260 cubic feet per minute.
- Power: 1 Phase 220V VAC,50/60 Hz
相關資訊:
N/A