Equipment description:

‧Purpose: Thin Film Measurement Systems

‧Model: UV1280SE

‧Original Manufacture Date: 1997

‧SN: 971096UV1280SE

System configuration:

‧Currently Configured for 200mm Wafer Size

‧Cassette Handling: SMIF

‧Robot: PRI

‧Chuck Type: 200mm

‧PC configurations:

1. CPU: PIII 450MHz
2. Memory: 128M
3. OS: Windows NT4.0 environment

‧Application software: SUMMIT V2.3

‧GEM/SECS: 

‧Facilities:

1. Vacuum: 20” (510 mm) Hg @ 1 SCFM
2. Air: Minimum 80-100 psi
3. Exhaust Vent and Fittings: 6” (150 mm) diameter, flexible hose,

pulling 260 cubic feet per minute.

4. Power: 1 Phase 110V VAC,50/60 Hz

N/A