Equipment description:

‧Purpose: Overlay measurement

‧Model: KLA-Tencor 5200XP

‧Original Manufacture Date: October, 1997

‧SN: 2100

System configuration:

‧Currently Configured for 200mm Wafer Size

‧Handler: 200mm Dual SMIF

‧Cassette Handling: Vacuum Handling Autoloader

‧Robot: Autoloader, Single End-Effector

‧Chuck Type: 200mm Vacuum

‧Operator Interface: Mouse and keyboard standard

N/A